年度	2014
全部作者	邱一
论文名称	“Design and fabrication of a near-field scanning optical microscope probe by CMOS-MEMS,” C.H. Liou, Y. Chiu, H.P. D. Shieh, and J.C. Chiou, Optical MEMS and Nanophotonics 2012, Canada, 168-9 (2012).
发表日期	2014-05-19