Year	2011
Authors	Chiu, Yi
Paper Title	“Assembly of micro-3-D components on SOI wafers using novel SU-8 locking mechanisms and vertical one-push operation,” Y. Chiu, C.-S. Wu, W.-Z. Huang, and J.-W. Wu, IEEE J. Sel. Topics Quantum Electron., 15(5), 1338-43 (2009).
Date of Publication	2011-07-29