Year | 2011 |
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Authors | Chiu, Yi |
Paper Title | “Assembly of micro-3-D components on SOI wafers using novel SU-8 locking mechanisms and vertical one-push operation,” Y. Chiu, C.-S. Wu, W.-Z. Huang, and J.-W. Wu, IEEE J. Sel. Topics Quantum Electron., 15(5), 1338-43 (2009). |
Date of Publication | 2011-07-29 |