Year	2011
Authors	Chao, Chang-Po
Paper Title	Paul C.-P. Chao*, Lun-De Liao, Tsung-Shien Lu, Chien-Wei Liu and Chi-Wei Chiu, 2008, “Design and Fabrication of a Low-Stress Membrane for Microphones via Low Temperature Processes,” The 34th International Conference on Micro and Nano Engineering, Hilton Athens, Greece, Sep. 15-18, 2008.
Date of Publication	2011-08-03