年度	2011
全部作者	邱一
论文名称	“Micro knife-edge optical measurement devices fabricated by SOI and CMOS MEMS processes,” T-L. Chang, V. F-G. Tseng, and Y. Chiu, IEEE/LEOS Optical MEMS and Nanophotonics 2007, Taiwan, 31-32 (2007).
发表日期	2011-07-26