Year	2011
Authors	Chiu, Yi
Paper Title	“Integration of SOI and SU-8 in a surface-micromachining-like process and its application in micro optical system,” C-W. Chung, C-W. Wu, and Y. Chiu, 台灣光電科技研討會 (OPT), 2005.
Date of Publication	2011-07-29