年度 | 2011 |
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全部作者 | 邱一 |
论文名称 | “Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation,” Y. Chiu, W.-Z. Huang, J.-W. Wu, J.-C. Chiou, and H.-P. D. Shieh, IEEE/LEOS Optical MEMS and Nanophotonics, Germany, 110-1 (2008). |
发表日期 | 2011-07-26 |