Year	2011
Authors	Chiu, Yi
Paper Title	“Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation,” Y. Chiu, W.-Z. Huang, J.-W. Wu, J.-C. Chiou, and H.-P. D. Shieh, IEEE/LEOS Optical MEMS and Nanophotonics, Germany, 110-1 (2008).
Date of Publication	2011-07-26