Year	2011
Authors	Chao, Chang-Po
Paper Title	Lun-De Liao, Paul C.-P. Chao*, Yu-Jhu Lin, Chi-Wei Chiu, Shaou-Gang Miaou, Ming Chang and Jeng-Sheng Huang, 2009, “Precision Micro-/Nano-machining in a Scanning Electron Microscope by Run-to-Run Control Based on Image Feedbacks,” Microelectronic Engineering, Vol. 86, Issue 4-6, pp. 1162-1168, 2009. (SCI Journal, Impact Factor =1.503, NSC96-2220-E-009-029 and NSC95-2745-E-033-004-URD)
Date of Publication	2011-08-03