Year	2011
Authors	Chao, Chang-Po
Paper Title	Lun-De Liao and Paul C.-P. Chao, “Run-to-Run Control Based on Image Feedbacks for Precision Micro-/Nano- machining in a Scanning Electron Microscope,” The 14th North-East Asia Symposium on Nano, Information Technology and Reliability, Hsinchu, Taiwan, May 15, 2009.
Date of Publication	2011-08-03