Year 2011
Authors Chiu, Yi
Paper Title “Silicon-nitride based micro optical components for optical pickup application,” C-H. Lee, Y. Chiu, C-H. Tien, and H-P. D. Shieh, Proc. SPIE, Vol. 5836, Smart Sensors, Actuators, and MEMS II, Spain, 200-7 (2005).
Date of Publication 2011-07-26